ENEE 416: Integrated Circuit (IC) Fabrication Lab (Fall 2011)

Assigned: 10/06/09

Due: 10/12/11, 5 p.m.

Group: Caitlyn Gardner and Quang Huynh

Topic: Scanning Electron Microscopy vs Focused Ion Beam

Explain the concepts and fundamentals of both methods, discuss applications, and give device examples. Prepare a 10-minute PowerPoint presentation, a 2-3 page report using font Times New Roman 11 ( including figures and references), and 4 problems with solutions. Please e-mail the PowerPoint presentation, the report (in pdf or Word), problems (in pdf or Word) and solutions (in pdf or Word) to Prof. Ghodssi and Mike Fan.

* SEM vs FIB Paper
* SEM vs FIB Presentation
* SEM vs FIB Questions
* SEM vs FIB Solutions