ENEE 416: Integrated Circuit (IC) Fabrication Lab (Fall 2011)

Assigned: 10/15/09

Due: 10/19/11, 5 p.m.

Group: Muhammad Khan and Min Sun Kim

Topic: Damascene Process

Explain the concept of Damascene process, describe its contribution to CMOS technology, and discuss its challenges. Include discussions about dual Damascene process and chemical mechanical polishing. Prepare a 10-minute PowerPoint presentation, a 2-3 page report using font Times New Roman 11 ( including figures and references), and 4 problems with solutions. Please e-mail the PowerPoint presentation, the report (in pdf or Word), problems (in pdf or Word) and solutions (in pdf or Word) to Prof. Ghodssi and Mike Fan.

*Damascene Process Report
*Damascene Process Presentation
*Damascene Process Questions
*Damascene Process Solutions