Jon Orloff

Professor

Department of Electrical and Computer Engineering &

Institute for Research in Electronics and Applied Physics

University of Maryland

Research Interests

· High resolution focused ion beams and their applications

· High brightness electron and ion sources

Education

· B.S. M.I.T. 1964

· Ph.D. Oregon Graduate Institute 1977

Prof. Orloff worked for many years at the Oregon Graduate Institute where he developed high resolution focused ion beam (FIB) technology based on field emission ions sources, in particular the liquid metal ion source. This technology is an essential tool for semiconductor device fabrication and design. He has also been active in the development of high resolution SEM technology and, while a professor in Oregon, was primarily responsible for the commercialization of focused ion beam technology by FEI Company, of which he was one of the original four partners. Professor Orloff received an N.S.F. Career Award in 1984 and is a Fellow of I.E.E.E. and of A.A.A.S.

Example of FIB applications: IC cross sectioning

and scanning ion microscopy

Contact information:

Telephone: 1-301-405-5022

e-mail: jono@eng.umd.edu

snail mail: Energy Research Facility

University of Maryland

College Park, MD 20742-3511 USA