Credits:
Semesters Offered
Learning Objectives
- Provide students an understanding of how a silicon wafer is turned into an operating integrated circuit
- Review transistor operation and the IC fabrication steps stressing how processing parameters affect transistor performance
- Carry out the fabrication steps needed to produce transistors, resistors, and capacitors
- Test the transistors and other related components that have been fabricated and investigate the effects of processing parameters
Topics Covered
- Semiconductor device fundamentals
- Lithography (resist spinning, contact aligner exposure, and development)
- Oxide growth
- Chemical vapor deposition
- Reactive ion etching
- Doping and dopant diffusion
- Metal deposition and patterning
- Analysis of fabricated devices
- Silicon bulk and surface micromachining