M.S. Thesis Defense - Kezhen Xu

Tuesday, December 3, 2019
4:00 p.m.

Melanie Prange
301 405 3686
mprange@umd.edu

Announcement: M.S. Thesis Defense


Name: Kezhen Xu

Committee members:
Professor Agis Iliadis, Chair/Advisor
Professor Martin Peckerar
Professor Kevin Daniels 

Date/Time: Tuesday December 3rd, 2019 at 4:00 pm 

Location: AVW 2168 

Title: Surface Acoustic Wave (SAW) Propagation in Nanostructured devices 

Abstract: 

ZnO/SiO2/Si surface acoustic wave Love mode sensors are considered to be promising high sensitivity sensors. Previous research has tested ZnO/SiO2/Si SAW sensors with selected operating frequency and guiding layer thickness. This investigation is based on experimental data of previous research and used the theories and equations from that research to evaluate and develop a model of the mass sensitivity of surface acoustic wave (SAW) devices with two different piezoelectric semiconductors, ZnO/SiO2/Si and GaN/SiO2/Si Love mode SAW sensors. The SAW mass sensitivity model developed here, examined the mass sensitivity of the SAW device with respect to the design parameters, like wavelength, piezoelectric layer thickness, and the two different semiconductors (ZnO, and GaN) to obtain optimum mass sensitivity. The results showed that optimal mass sensitivity is achieved at optimum wavelength below 10 µm and a layer thickness at 3.4 µm. The mass sensitivity increases when the wavelength increasing. Moreover, the model also showed that the GaN has nearly two times better mass sensitivity than ZnO-based devices.

 

Audience: Graduate  Faculty 

 

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