Event
Microelectronics Seminar: Dr. Sanghyeon Park, Lam Research Corporation
Friday, March 7, 2025
11:00 a.m.
2460 A.V. Williams
Darcy Long
301 405 3114
dlong123@umd.edu
Speaker: Dr. Sanghyeon Park, Lam Research Corporation
Title: Advancing High Voltage Power Electronics: From Micro-Robots to Plasma Systems
Abstract: High-voltage, high-frequency power electronics are essential for advancing emerging technologies, from micro-robotics to plasma applications. This talk presents my research on designing and implementing compact, high-voltage power converters, including multi-kV generators for insect-scale robots, high-power amplifiers for semiconductor plasma processing, and my vision for ultra-fast nanosecond pulsed power supplies in environmental and energy applications.I will also explore the fundamental challenges of diode-capacitor voltage multiplier design, particularly the trade-off between output power and device voltage stress, and introduce a novel hybrid voltage multiplier topology that enhances power density and performance. My work has been successfully demonstrated in applications ranging from small robots to industrial plasma chambers. Finally, I will discuss the future of high-voltage power electronics, propelled by advancements in wide-bandgap semiconductors (SiC and GaN), and their potential to transform fields such as water treatment, fusion energy, and high-energy physics. By leveraging nanosecond pulsed power techniques, we can develop compact, high-power systems, enabling portable solutions across environmental, energy, and medical sectors.
Bio: Sanghyeon Park was born in Seoul, Korea, in 1991. He received his B.S. degree in Electrical Engineering from Seoul National University in 2015, followed by M.S. and Ph.D. degrees in Electrical Engineering from Stanford University in 2019 and 2021, respectively. After completing his doctorate, he joined Lam Research Corporation in Fremont, CA, where he is currently a Staff RF Engineer in the Etch Product Group. His work has focused on developing high-frequency, high-voltage power converters and nanosecond pulse generators for advanced plasma applications. His research interests extend to miniaturized high-voltage generators, compact power systems, and their applications in robotics and semiconductor manufacturing.
